Method of forming low profile wire bonds between integrated circuits dies and printed circuit boards

ABSTRACT

A method of profiling a series of wire bonds between a line of contact pads on a die, and a corresponding set of conductors on a supporting structure, by electrically connecting each of the contact pads on the die to a corresponding conductor on the supporting structure with a respective wire bond, each of the wire bonds extending in an arc from the contact pad to the conductor, and, pushing on each of the wire bonds individually to collapse the arc and plastically deform the wire bond such that the plastic deformation maintains the wire bond in a flatter profile shape.

The present application is a Continuation-In-Part of U.S. Ser. No. 11/860,539, filed Sep. 25, 2007, the contents of which are incorporated herein by cross reference.

FIELD OF THE INVENTION

The invention relates to the field of integrated circuits. In particular, the invention is directed to the wire bonds between a circuit board and the contact pads on the integrated circuit die.

CO-PENDING APPLICATIONS

The following application has been filed by the Applicant simultaneously with the present application:

-   -   Ser. Nos. 12/046,452 12/046,453 12/046,454

The disclosure of this co-pending application is incorporated herein by reference.

CROSS REFERENCES TO RELATED APPLICATIONS

Various methods, systems and apparatus relating to the present invention are disclosed in the following US Patents/Patent Applications filed by the applicant or assignee of the present invention:

6,276,850 6,520,631 6,158,907 6,539,180 6,270,177 6,405,055 6,628,430 6,835,135 6,626,529 6,981,769 7,125,338 7,125,337 7,136,186 7,286,260 7,145,689 7,130,075 7,081,974 7,177,055 7,209,257 6,443,555 7,161,715 7,154,632 7,158,258 7,148,993 7,075,684 10/943,905 10/943,906 10/943,904 10/943,903 10/943,902 6,966,659 6,988,841 7,077,748 7,255,646 7,070,270 7,014,307 7,158,809 7,217,048 11/225,172 11/255,942 11/329,039 11/329,040 7,271,829 11/442,189 11/474,280 11/483,061 11/503,078 11/520,735 11/505,858 11/525,850 11/583,870 11/592,983 11/592,208 11/601,828 11/635,482 11/635,526 10/466,440 7,215,441 11/650,545 11/653,241 11/653,240 7,056,040 6,942,334 11/706,300 11/740,265 11/737,720 11/739,056 11/740,204 11/740,223 11/753,557 11/750,285 11/758,648 11/778,559 11/834,634 11/838,878 11/845,669 12/015,407 12/017,331 12/030,823 6,799,853 7,237,896 6,749,301 10/451,722 7,137,678 7,252,379 7,144,107 10/503,900 10/503,898 10/503,897 7,220,068 7,270,410 7,241,005 7,108,437 7,140,792 10/503,922 7,224,274 10/503,917 10/503,918 10/503,925 10/503,927 10/503,928 10/503,929 10/503,885 7,195,325 7,229,164 7,150,523 10/503,889 7,154,580 6,906,778 7,167,158 7,128,269 6,688,528 6,986,613 6,641,315 7,278,702 10/503,891 7,150,524 7,155,395 6,915,140 6,999,206 6,795,651 6,883,910 7,118,481 7,136,198 7,092,130 6,786,661 6,808,325 10/920,368 10/920,284 7,219,990 10/920,283 6,750,901 6,476,863 6,788,336 6,322,181 6,597,817 6,227,648 6,727,948 6,690,419 10/470,947 6,619,654 6,969,145 6,679,582 7,328,896 6,568,670 6,866,373 7,280,247 7,008,044 6,742,871 6,966,628 6,644,781 6,969,143 6,767,076 6,834,933 6,692,113 6,913,344 6,727,951 7,128,395 7,036,911 7,032,995 6,969,151 6,955,424 6,969,162 10/919,249 6,942,315 11/006,577 7,234,797 6,986,563 7,295,211 11/045,442 7,286,162 7,283,159 7,077,330 6,196,541 7,303,257 11/185,725 7,226,144 11/202,344 7,267,428 11/248,423 11/248,422 7,093,929 11/282,769 11/330,060 11/442,111 7,290,862 11/499,806 11/499,710 6,195,150 11/749,156 11/782,588 11/854,435 11/853,817 11/935,958 11/924,608 6,362,868 11/970,993 12/031,526 6,831,681 6,431,669 6,362,869 6,472,052 6,356,715 6,894,694 6,636,216 6,366,693 6,329,990 6,459,495 6,137,500 6,690,416 7,050,143 6,398,328 7,110,024 6,431,704 6,879,341 6,415,054 6,665,454 6,542,645 6,486,886 6,381,361 6,317,192 6,850,274 09/113,054 6,646,757 6,624,848 6,357,135 6,271,931 6,353,772 6,106,147 6,665,008 6,304,291 6,305,770 6,289,262 6,315,200 6,217,165 6,496,654 6,859,225 6,924,835 6,647,369 6,943,830 09/693,317 7,021,745 6,712,453 6,460,971 6,428,147 6,416,170 6,402,300 6,464,340 6,612,687 6,412,912 6,447,099 6,837,567 6,505,913 7,128,845 6,733,684 7,249,108 6,566,858 6,331,946 6,246,970 6,442,525 09/517,384 09/505,951 6,374,354 7,246,098 6,816,968 6,757,832 6,334,190 6,745,331 7,249,109 7,197,642 7,093,139 10/636,263 10/636,283 10/866,608 7,210,038 10/902,883 10/940,653 10/942,858 11/706,329 11/757,385 11/758,642 7,119,836 7,283,162 7,286,169 10/636,285 7,170,652 6,967,750 6,995,876 7,099,051 7,172,191 7,243,916 7,222,845 11/239,232 7,285,227 7,063,940 11/107,942 7,193,734 7,086,724 7,090,337 7,278,723 7,140,717 11/190,902 11/209,711 7,256,824 7,140,726 7,156,512 7,186,499 11/478,585 11/525,862 11/540,574 11/583,875 11/592,181 6,750,944 11/599,336 7,291,447 11/744,183 11/758,646 11/778,561 11/839,532 11/838,874 11/853,021 11/869,710 11/868,531 11/927,403 11/951,960 12/019,556 10/636,225 6,985,207 6,773,874 6,650,836 7,324,142 10/636,224 7,250,975 7,295,343 6,880,929 7,236,188 7,236,187 7,155,394 10/636,219 10/636,223 7,055,927 6,986,562 7,052,103 7,312,845 10/656,281 10/656,791 10/666,124 10/683,217 7,289,142 7,095,533 6,914,686 6,896,252 6,820,871 6,834,851 6,848,686 6,830,246 6,851,671 10/729,098 7,092,011 7,187,404 10/729,159 10/753,458 6,878,299 6,929,348 6,921,154 10/780,625 10/804,042 6,913,346 10/831,238 10/831,237 10/831,239 10/831,240 10/831,241 10/831,234 10/831,233 7,246,897 7,077,515 10/831,235 10/853,336 10/853,117 10/853,659 10/853,681 6,913,875 7,021,758 7,033,017 7,161,709 7,099,033 7,147,294 7,156,494 11/012,024 11/011,925 7,032,998 7,044,585 7,296,867 6,994,424 11/006,787 7,258,435 7,097,263 7,001,012 7,004,568 7,040,738 7,188,933 7,027,080 7,025,446 6,991,321 7,131,715 7,261,392 7,207,647 7,182,435 7,097,285 7,331,646 7,097,284 7,083,264 7,147,304 7,232,203 7,156,498 7,201,471 11/501,772 11/503,084 11/513,073 7,210,764 11/635,524 11/706,379 11/730,386 11/730,784 11/753,568 11/782,591 11/859,783 12/015,243 12/037,069 6,710,457 6,775,906 6,507,099 7,221,043 7,107,674 7,154,172 11/442,400 7,247,941 11/736,540 7,307,354 11/940,304 6,530,339 6,631,897 6,851,667 6,830,243 6,860,479 6,997,452 7,000,913 7,204,482 11/212,759 11/281,679 11/730,409 6,238,044 6,425,661 11/003,786 7,258,417 7,293,853 7,328,968 7,270,395 11/003,404 11/003,419 7,334,864 7,255,419 7,284,819 7,229,148 7,258,416 7,273,263 7,270,393 6,984,017 11/003,699 11/071,473 7,156,497 11/601,670 11/748,482 11/778,563 11/779,851 11/778,574 11/853,816 11/853,814 11/853,786 11/872,037 11/856,694 11/965,703 11/971,170 12/023,011 12/036,896 11/003,463 11/003,701 11/003,683 11/003,614 7,284,820 7,341,328 7,246,875 7,322,669 11/764,760 11/853,777 11/955,354 12/022,994 11/293,800 11/293,802 11/293,801 11/293,808 11/293/809 11/482,975 11/482,970 11/482,968 11/482,972 11/482,971 11/482,969 6,431,777 6,334,664 6,447,113 7,239,407 6,398,359 6,652,089 6,652,090 7,057,759 6,631,986 7,187,470 7,280,235 11/501,775 11/744,210 11/859,784 6,471,331 6,676,250 6,347,864 6,439,704 6,425,700 6,588,952 6,626,515 6,722,758 6,871,937 11/060,803 11/097,266 7,328,976 11/685,084 11/685,086 11/685,090 11/740,925 11/763,444 11/763,443 11/946,840 11/961,712 12/017,771 7,249,942 7,206,654 7,162,324 7,162,325 7,231,275 7,146,236 7,278,847 10/753,499 6,997,698 7,220,112 7,231,276 10/753,440 7,220,115 7,195,475 7,144,242 7,306,323 7,306,319 11/525,858 7,322,674 11/599,335 11/706,380 11/736,545 11/736,554 11/739,047 11/749,159 11/739,073 11/775,160 11/853,755 11/940,291 11/934,071 11/951,913 6,786,420 6,827,282 6,948,661 7,073,713 10/983,060 7,093,762 7,083,108 7,222,799 7,201,319 11/442,103 11/739,071 11/518,238 11/518,280 11/518,244 11/518,243 11/518,242 7,032,899 6,854,724 7,331,651 7,334,870 7,334,875 11/357,296 11/357,298 11/357,297 12/015,479 12/017,270 12/015,218 6,350,023 6,318,849 6,592,207 6,439,699 6,312,114 11/246,676 11/246,677 11/246,678 11/246,679 11/246,680 11/246,681 11/246,714 11/246,713 11/246,689 11/246,671 11/246,670 11/246,669 11/246,704 11/246,710 11/246,688 11/246,716 11/246,715 11/246,707 11/246,706 11/246,705 11/246,708 11/246,693 11/246,692 11/246,696 11/246,695 11/246,694 11/482,958 11/482,955 11/482,962 11/482,963 11/482,956 11/482,954 11/482,974 11/482,957 11/482,987 11/482,959 11/482,960 11/482,961 11/482,964 11/482,965 11/482,976 11/482,973 11/495,815 11/495,816 11/495,817 60/992,635 60/992,637 60/992,641 10/803,074 10/803,073 7,040,823 10/803,076 10/803,077 10/803,078 10/803,079 10/922,971 10/922,970 10/922,836 10/922,842 10/922,848 10/922,843 7,125,185 7,229,226 11/513,386 11/753,559 10/815,621 7,243,835 10/815,630 10/815,637 10/815,638 7,251,050 10/815,642 7,097,094 7,137,549 10/815,618 7,156,292 11/738,974 10/815,635 10/815,647 10/815,634 7,137,566 7,131,596 7,128,265 7,207,485 7,197,374 7,175,089 10/815,617 10/815,620 7,178,719 10/815,613 7,207,483 7,296,737 7,270,266 10/815,614 7,314,181 11/488,162 11/488,163 11/488,164 11/488,167 11/488,168 11/488,165 11/488,166 7,267,273 11/834,628 11/839,497 11/944,449 10/815,636 7,128,270 11/041,650 11/041,651 11/041,652 11/041,649 11/041,610 11/863,253 11/863,255 11/863,257 11/863,258 11/863,262 11/041,609 11/041,626 11/041,627 11/041,624 11/041,625 11/863,268 11/863,269 11/863,270 11/863,271 11/863,273 76/584,73 11/041,556 11/041,580 11/041,723 11/041,698 11/041,648 11/863,263 11/863,264 11/863,265 11/863,266 11/863,267 10/815,609 7,150,398 7,159,777 10/815,610 7,188,769 7,097,106 7,070,110 7,243,849 7,314,177 11/480,957 11/764,694 11/957,470 6,227,652 6,213,588 6,213,589 6,231,163 6,247,795 6,394,581 6,244,691 6,257,704 6,416,168 6,220,694 6,257,705 6,247,794 6,234,610 6,247,793 6,264,306 6,241,342 6,247,792 6,264,307 6,254,220 6,234,611 6,302,528 6,283,582 6,239,821 6,338,547 6,247,796 6,557,977 6,390,603 6,362,843 6,293,653 6,312,107 6,227,653 6,234,609 6,238,040 6,188,415 6,227,654 6,209,989 6,247,791 6,336,710 6,217,153 6,416,167 6,243,113 6,283,581 6,247,790 6,260,953 6,267,469 6,588,882 6,742,873 6,918,655 6,547,371 6,938,989 6,598,964 6,923,526 6,273,544 6,309,048 6,420,196 6,443,558 6,439,689 6,378,989 6,848,181 6,634,735 6,299,289 6,299,290 6,425,654 6,902,255 6,623,101 6,406,129 6,505,916 6,457,809 6,550,895 6,457,812 7,152,962 6,428,133 7,216,956 7,080,895 11/144,844 7,182,437 11/599,341 11/635,533 11/607,976 11/607,975 11/607,999 11/607,980 11/607,979 11/607,978 11/735,961 11/685,074 11/696,126 11/696,144 11/696,650 11/763,446 6,224,780 6,235,212 6,280,643 6,284,147 6,214,244 6,071,750 6,267,905 6,251,298 6,258,285 6,225,138 6,241,904 6,299,786 6,866,789 6,231,773 6,190,931 6,248,249 6,290,862 6,241,906 6,565,762 6,241,905 6,451,216 6,231,772 6,274,056 6,290,861 6,248,248 6,306,671 6,331,258 6,110,754 6,294,101 6,416,679 6,264,849 6,254,793 6,245,246 6,855,264 6,235,211 6,491,833 6,264,850 6,258,284 6,312,615 6,228,668 6,180,427 6,171,875 6,267,904 6,245,247 6,315,914 7,169,316 6,526,658 7,210,767 11/056,146 11/635,523 6,665,094 6,450,605 6,512,596 6,654,144 7,125,090 6,687,022 7,072,076 7,092,125 7,215,443 7,136,195 7,077,494 6,877,834 6,969,139 10/636,227 7,283,280 6,912,067 7,277,205 7,154,637 10/636,230 7,070,251 6,851,782 10/636,211 10/636,247 6,843,545 7,079,286 7,064,867 7,065,247 7,027,177 7,218,415 7,064,873 6,954,276 7,061,644 7,092,127 7,059,695 10/990,382 7,177,052 7,270,394 11/124,231 7,188,921 7,187,469 7,196,820 11/281,445 7,283,281 7,251,051 7,245,399 11/524,911 11/640,267 11/706,297 11/730,387 11/737,142 7,336,397 11/834,637 11/853,019 11/863,239 12/015,485 12/030,797 11/305,274 11/305,273 11/305,275 11/305,152 11/305,158 11/305,008 6,231,148 6,293,658 6,614,560 6,238,033 6,312,070 6,238,111 6,378,970 6,196,739 6,270,182 6,152,619 7,006,143 6,876,394 6,738,096 6,970,186 6,287,028 6,412,993 11/033,145 11/102,845 11/102,861 11/248,421 11/672,878 7,204,941 7,282,164 10/815,628 11/845,672 7,278,727 10/913,373 10/913,374 10/913,372 7,138,391 7,153,956 10/913,380 10/913,379 10/913,376 7,122,076 7,148,345 11/172,816 11/172,815 11/172,814 11/482,990 11/482,986 11/482,985 11/454,899 11/583,942 11/592,990 11/849,360 11/831,961 11/831,962 11/831,963 60/951,700 11/832,629 11/832,637 60/971,535 61/027,756 10/407,212 7,252,366 10/683,064 10/683,041 7,275,811 10/884,889 10/922,890 7,334,874 10/922,885 10/922,889 10/922,884 10/922,879 10/922,887 10/922,888 10/922,874 7,234,795 10/922,871 7,328,975 7,293,855 10/922,882 10/922,883 10/922,878 10/922,872 10/922,876 10/922,886 10/922,877 7,147,792 7,175,774 11/159,193 11/491,378 11/766,713 11/841,647 12/018,040 12/035,410 12/037,054 11/482,980 11/563,684 11/482,967 11/482,966 11/482,988 11/482,989 11/293,832 11/293,838 11/293,825 11/293,841 11/293,799 11/293,796 11/293,797 11/293,798 11/124,158 11/124,196 11/124,199 11/124,162 11/124,202 11/124,197 11/124,154 11/124,198 7,284,921 11/124,151 11/124,160 11/124,192 11/124,175 11/124,163 11/124,149 11/124,152 11/124,173 11/124,155 7,236,271 11/124,174 11/124,194 11/124,164 11/124,200 11/124,195 11/124,166 11/124,150 11/124,172 11/124,165 11/124,186 11/124,185 11/124,184 11/124,182 11/124,201 11/124,171 11/124,181 11/124,161 11/124,156 11/124,191 11/124,159 11/124,176 11/124,188 11/124,170 11/124,187 11/124,189 11/124,190 11/124,180 11/124,193 11/124,183 11/124,178 11/124,177 11/124,148 11/124,168 11/124,167 11/124,179 11/124,169 11/187,976 11/188,011 11/188,014 11/482,979 11/735,490 11/853,018 11/944,450 12/023,815 12/035,414 11/228,540 11/228,500 11/228,501 11/228,530 11/228,490 11/228,531 11/228,504 11/228,533 11/228,502 11/228,507 11/228,482 11/228,505 11/228,497 11/228,487 11/228,529 11/228,484 11/228,489 11/228,518 11/228,536 11/228,496 11/228,488 11/228,506 11/228,516 11/228,526 11/228,539 11/228,538 11/228,524 11/228,523 11/228,519 11/228,528 11/228,527 11/228,525 11/228,520 11/228,498 11/228,511 11/228,522 11/228,515 11/228,537 11/228,534 11/228,491 11/228,499 11/228,509 11/228,492 11/228,493 11/228,510 11/228,508 11/228,512 11/228,514 11/228,494 11/228,495 11/228,486 11/228,481 11/228,477 11/228,485 11/228,483 11/228,521 11/228,517 11/228,532 11/228,513 11/228,503 11/228,480 11/228,535 11/228,478 11/228,479 12/035,419 6,238,115 6,386,535 6,398,344 6,612,240 6,752,549 6,805,049 6,971,313 6,899,480 6,860,664 6,925,935 6,966,636 7,024,995 7,284,852 6,926,455 7,056,038 6,869,172 7,021,843 6,988,845 6,964,533 6,981,809 7,284,822 7,258,067 7,322,757 7,222,941 7,284,925 7,278,795 7,249,904 11/737,726 11/772,240 11/863,246 11/863,145 11/865,650 6,087,638 6,340,222 6,041,600 6,299,300 6,067,797 6,286,935 6,044,646 6,382,769 6,787,051 6,938,990 11/242,916 11/144,799 11/198,235 11/861,282 11/861,284 11/766,052 7,152,972 11/592,996 D529952 6,390,605 6,322,195 6,612,110 6,480,089 6,460,778 6,305,788 6,426,014 6,364,453 6,457,795 6,315,399 6,338,548 7,040,736 6,938,992 6,994,425 6,863,379 6,540,319 6,994,421 6,984,019 7,008,043 6,997,544 6,328,431 6,991,310 10/965,772 7,140,723 6,328,425 6,982,184 7,267,423 7,134,741 7,066,577 7,152,945 7,303,689 7021,744 6,991,320 7,155,911 11/107,799 6,595,624 7,152,943 7,125,103 7,328,971 7,290,857 7,285,437 7,229,151 11/330,058 7,237,873 11/329,163 11/442,180 11/450,431 7,213,907 6,417,757 11/482,951 11/545,566 11/583,826 11/604,315 11/604,323 11/643,845 11/706,950 11/730,399 11/749,121 11/753,549 11/834,630 11/935,389 11/869,670 7,095,309 11/945,157 11/957,473 11/967,235 12/017,896 6,854,825 6,623,106 6,672,707 6,575,561 6,817,700 6,588,885 7,075,677 6,428,139 6,575,549 6,846,692 6,425,971 7,063,993 6,383,833 6,955,414 6,412,908 6,746,105 6,953,236 6,412,904 7,128,388 6,398,343 6,652,071 6,793,323 6,659,590 6,676,245 7,201,460 6,464,332 6,659,593 6,478,406 6,978,613 6,439,693 6,502,306 6,966,111 6,863,369 6,428,142 6,874,868 6,390,591 6,799,828 6,896,358 7,018,016 10/296,534 6,328,417 6,322,194 6,382,779 6,629,745 6,565,193 6,609,786 6,609,787 6,439,908 6,684,503 6,843,551 6,764,166 6,561,617 10/510,092 6,557,970 6,546,628 10/510,098 6,652,074 6,820,968 7,175,260 6,682,174 7,303,262 6,648,453 6,834,932 6,682,176 6,998,062 6,767,077 7,278,717 6,755,509 10/534,813 6,692,108 10/534,811 6,672,709 7,303,263 7,086,718 10/534,881 6,672,710 10/534,812 6,669,334 7,322,686 7,152,958 7,281,782 6,824,246 7,264,336 6,669,333 10/534,815 6,820,967 7,306,326 6,736,489 7,264,335 6,719,406 7,222,943 7,188,419 7,168,166 6,974,209 7,086,719 6,974,210 7,195,338 7,252,775 7,101,025 11/474,281 11/485,258 11/706,304 11/706,324 11/706,326 11/706,321 11/772,239 11/782,598 11/829,941 11/852,991 11/852,986 11/936,062 11/934,027 11/955,028 12/034,578 12/036,908 11/763,440 11/763,442 11/246,687 11/246,718 7,322,681 11/246,686 11/246,703 11/246,691 11/246,711 11/246,690 11/246,712 11/246,717 11/246,709 11/246,700 11/246,701 11/246,702 11/246,668 11/246,697 11/246,698 11/246,699 11/246,675 11/246,674 11/246,667 11/829,957 11/829,960 11/829,961 11/829,962 11/829,963 11/829,966 11/829,967 11/829,968 11/829,969 11/946,839 11/946,838 11/946,837 11/951,230 7,156,508 7,159,972 7,083,271 7,165,834 7,080,894 7,201,469 7,090,336 7,156,489 10/760,233 10/760,246 7,083,257 7,258,422 7,255,423 7,219,980 10/760,253 10/760,255 10/760,209 7,118,192 10/760,194 7,322,672 7,077,505 7,198,354 7,077,504 10/760,189 7,198,355 10/760,232 7,322,676 7,152,959 7,213,906 7,178,901 7,222,938 7,108,353 7,104,629 11/446,227 11/454,904 11/472,345 11/474,273 7,261,401 11/474,279 11/482,939 7,328,972 7,322,673 7,306,324 7,306,325 11/603,824 11/601,756 11/601,672 7,303,261 11/653,253 11/706,328 11/706,299 11/706,965 11/737,080 11/737,041 11/778,062 11/778,566 11/782,593 11/934,018 11/945,157 11/951,095 11/951,828 11/954,906 11/954,949 11/967,226 7,303,930 11/246,672 11/246,673 11/246,683 11/246,682 60/939,086 11/860,538 11/860,539 11/860,540 11/860,541 11/860,542 11/936,060 11/877,667 11/877,668 7,246,886 7,128,400 7,108,355 6,991,322 7,287,836 7,118,197 10/728,784 10/728,783 7,077,493 6,962,402 10/728,803 7,147,308 10/728,779 7,118,198 7,168,790 7,172,270 7,229,155 6,830,318 7,195,342 7,175,261 10/773,183 7,108,356 7,118,202 10/773,186 7,134,744 10/773,185 7,134,743 7,182,439 7,210,768 10/773,187 7,134,745 7,156,484 7,118,201 7,111,926 10/773,184 7,018,021 11/060,751 11/060,805 11/188,017 7,128,402 11/298,774 11/329,157 11/490,041 11/501,767 7,284,839 7,246,885 7,229,156 11/505,846 11/505,857 7,293,858 11/524,908 11/524,938 7,258,427 11/524,912 7,278,716 11/592,995 11/603,825 11/649,773 11/650,549 11/653,237 11/706,378 11/706,962 11/749,118 11/754,937 11/749,120 11/744,885 11/779,850 11/765,439 11/842,950 11/839,539 11/926,121 12/025,621 11/097,308 11/097,309 7,246,876 11/097,299 11/097,310 11/097,213 7,328,978 7,334,876 7,147,306 7,261,394 11/764,806 11/782,595 11/965,696 12/027,286 11/482,953 11/482,977 11/544,778 11/544,779 11/764,808 11/756,624 11/756,625 11/756,626 11/756,627 11/756,628 11/756,629 11/756,630 11/756,631 7,156,289 7,178,718 7,225,979 11/712,434 11/084,796 11/084,742 11/084,806 09/575,197 09/575,197 7,079,712 7,079,712 6,825,945 6,825,945 7,330,974 7,330,974 6,813,039 6,813,039 7,190,474 6,987,506 6,987,506 6,824,044 7,038,797 7,038,797 6,980,318 6,980,318 6,816,274 6,816,274 7,102,772 7,102,772 09/575,186 09/575,186 6,681,045 6,681,045 6,678,499 6,679,420 6,963,845 6,976,220 6,728,000 6,728,000 7,110,126 7,173,722 7,173,722 6,976,035 6,813,558 6,766,942 6,965,454 6,995,859 7,088,459 7,088,459 6,720,985 7,286,113 6,922,779 6,978,019 6,847,883 7,131,058 7,295,839 09/607,843 09/693,690 6,959,298 6,973,450 7,150,404 6,965,882 7,233,924 09/575,181 09/575,181 09/722,174 7,175,079 7,162,259 6,718,061 10/291,523 10/291,471 7,012,710 6,825,956 10/291,481 7,222,098 10/291,825 7,263,508 7,031,010 6,972,864 6,862,105 7,009,738 6,989,911 6,982,807 10/291,576 6,829,387 6,714,678 6,644,545 6,609,653 6,651,879 10/291,555 7,293,240 10/291,592 10/291,542 7,044,363 7,004,390 6,867,880 7,034,953 6,987,581 7,216,224 10/291,821 7,162,269 7,162,222 7,290,210 7,293,233 7,293,234 6,850,931 6,865,570 6,847,961 10/685,523 10/685,583 7,162,442 10/685,584 7,159,784 10/804,034 10/793,933 6,889,896 10/831,232 7,174,056 6,996,274 7,162,088 10/943,874 10/943,872 10/944,044 7,259,884 10/944,043 7,167,270 10/943,877 6,986,459 10/954,170 7,181,448 10/981,626 10/981,616 7,324,989 7,231,293 7,174,329 10/992,713 7,295,922 7,200,591 11/020,106 11/020,260 11/020,321 11/020,319 11/026,045 11/059,696 11/051,032 11/059,674 11/107,944 11/107,941 11/082,940 11/082,815 11/082,827 11/082,829 6,991,153 6,991,154 11/124,256 11/123,136 11/154,676 7,322,524 11/182,002 11/202,251 11/202,252 11/202,253 11/203,200 11/202,218 11/206,778 11/203,424 11/222,977 7,327,485 11/227,239 11/286,334 7,225,402 11/329,187 11/349,143 11/491,225 11/491,121 11/442,428 11/454,902 11/442,385 11/478,590 7,271,931 11/520,170 11/603,057 11/706,964 11/739,032 11/739,014 7,336,389 11/830,848 11/830,849 11/839,542 11/866,394 11/934,077 11/951,874 12/015,487 12/023,860 12/023,005 12/036,266 7,068,382 7,068,382 7,007,851 6,957,921 6,457,883 10/743,671 7,044,381 11/203,205 7,094,910 7,091,344 7,122,685 7,038,066 7,099,019 7,062,651 7,062,651 6,789,194 6,789,194 6,789,191 6,789,191 10/900,129 7,278,018 10/913,350 10/982,975 10/983,029 11/331,109 6,644,642 6,644,642 6,502,614 6,502,614 6,622,999 6,622,999 6,669,385 6,669,385 6,827,116 7,011,128 10/949,307 6,549,935 6,549,935 6,987,573 6,987,573 6,727,996 6,727,996 6,591,884 6,591,884 6,439,706 6,439,706 6,760,119 6,760,119 7,295,332 7,295,332 7,064,851 6,826,547 6,290,349 6,290,349 6,428,155 6,428,155 6,785,016 6,785,016 6,831,682 6,741,871 6,927,871 6,980,306 6,965,439 6,840,606 7,036,918 6,977,746 6,970,264 7,068,389 7,093,991 7,190,491 10/901,154 10/932,044 10/962,412 7,177,054 10/962,552 10/965,733 10/965,933 10/974,742 10/982,974 7,180,609 10/986,375 11/107,817 7,292,363 11/149,160 11/206,756 11/250,465 7,202,959 11/653,219 11/706,309 11/730,389 11/730,392 60/953,443 11/866,387 60/974,077 6,982,798 6,870,966 6,870,966 6,822,639 6,822,639 6,474,888 6,627,870 6,724,374 6,788,982 7,263,270 6,788,293 6,946,672 6,737,591 6,737,591 7,091,960 09/693,514 6,792,165 7,105,753 6,795,593 6,980,704 6,768,821 7,132,612 7,041,916 6,797,895 7,015,901 7,289,882 7,148,644 10/778,056 10/778,058 10/778,060 10/778,059 10/778,063 10/778,062 10/778,061 10/778,057 7,096,199 7,286,887 10/917,467 10/917,466 7,324,859 7,218,978 7,245,294 7,277,085 7,187,370 10/917,436 10/943,856 10/919,379 7,019,319 10/943,878 10/943,849 7,043,096 7,148,499 11/144,840 11/155,556 11/155,557 11/193,481 11/193,435 11/193,482 11/193,479 7,336,267 11/281,671 11/298,474 7,245,760 11/488,832 11/495,814 11/495,823 11/495,822 11/495,821 11/495,820 11/653,242 11/754,370 60/911,260 11/829,936 11/839,494 11/866,305 11/866,313 11/866,324 11/866,336 11/866,348 11/866,359 11/970,951 12/036,264 7,055,739 7,055,739 7,233,320 7,233,320 6,830,196 6,830,196 6,832,717 6,832,717 7,182,247 7,120,853 7,082,562 6,843,420 10/291,718 6,789,731 7,057,608 6,766,944 6,766,945 7,289,103 10/291,559 7,299,969 7,264,173 10/409,864 7,108,192 10/537,159 7,111,791 7,077,333 6,983,878 10/786,631 7,134,598 10/893,372 6,929,186 6,994,264 7,017,826 7,014,123 7,134,601 7,150,396 10/971,146 7,017,823 7,025,276 7,284,701 7,080,780 11/074,802 7,334,739 11/749,158 11/842,948 12/015,477 12/025,746 12/025,747 12/025,748 12/025,749 12/025,750 12/025,751 12/025,754 12/025,756 12/025,757 12/025,759 12/025,760 12/025,761 12/025,762 12/025,764 12/025,765 12/025,766 12/025,767 12/025,768 10/492,169 10/492,152 10/492,168 10/492,161 7,308,148 10/502,575 10/531,229 10/683,151 10/531,733 10/683,040 10/510,391 10/919,260 10/510,392 10/778,090 11/944,404 11/936,638 12/031,615 6,957,768 6,957,768 09/575,172 09/575,172 7,170,499 7,170,499 7,106,888 7,106,888 7,123,239 7,123,239 6,982,701 6,982,703 7,227,527 6,786,397 6,947,027 6,975,299 7,139,431 7,048,178 7,118,025 6,839,053 7,015,900 7,010,147 7,133,557 6,914,593 10/291,546 6,938,826 7,278,566 7,123,245 6,992,662 7,190,346 11/074,800 11/074,782 11/074,777 11/075,917 7,221,781 11/102,843 7,213,756 11/188,016 7,180,507 7,263,225 7,287,688 11/737,094 11/753,570 11/782,596 11/865,711 12/036,904 11/856,061 11/856,062 11/856,064 11/856,066 11/672,522 11/672,950 11/672,947 11/672,891 11/672,954 11/672,533 11/754,310 11/754,321 11/754,320 11/754,319 11/754,318 11/754,317 11/754,316 11/754,315 11/754,314 11/754,313 11/754,312 11/754,311 12/015,507 12/015,508 12/015,509 12/015,510 12/015,511 12/015,512 12/015,513 6,593,166 7,132,679 6,940,088 7,119,357 7,307,272 6,755,513 6,974,204 6,409,323 7,055,930 6,281,912 6,893,109 6,604,810 6,824,242 6,318,920 7,210,867 6,488,422 6,655,786 6,457,810 6,485,135 6,796,731 6,904,678 6,641,253 7,125,106 6,786,658 7,097,273 6,824,245 7,222,947 6,918,649 6,860,581 6,929,351 7,063,404 6,969,150 7,004,652 6,871,938 6,905,194 6,846,059 6,997,626 7,303,256 7,029,098 6,966,625 7,114,794 7,207,646 7,077,496 7,284,831 11/072,529 7,152,938 7,182,434 7,182,430 7,306,317 7,032,993 7,325,905 11/155,545 11/144,813 7,172,266 7,258,430 7,128,392 7,210,866 7,306,322 11/505,933 11/540,727 11/635,480 11/707,946 11/706,303 11/709,084 11/730,776 11/744,143 11/779,845 11/782,589 11/863,256 11/940,302 11/940,235 11/955,359 12/019,583 12/019,566 12/036,910 11/066,161 11/066,160 11/066,159 11/066,158 7,287,831 11/875,936 12/017,818 6,804,030 6,807,315 6,771,811 6,683,996 7,271,936 7,304,771 6,965,691 7,058,219 7,289,681 7,187,807 7,181,063 11/338,783 11/603,823 11/650,536 12/025,633 10/727,181 10/727,162 10/727,163 10/727,245 7,121,639 7,165,824 7,152,942 10/727,157 7,181,572 7,096,137 7,302,592 7,278,034 7,188,282 10/727,159 10/727,180 10/727,179 10/727,192 10/727,274 10/727,164 10/727,161 10/727,198 10/727,158 10/754,536 10/754,938 10/727,227 10/727,160 10/934,720 7,171,323 7,278,697 11/442,131 11/474,278 11/488,853 7,328,115 11/749,750 11/749,749 11/955,127 11/951,213 10/296,522 6,795,215 7,070,098 7,154,638 6,805,419 6,859,289 6,977,751 6,398,332 6,394,573 6,622,923 6,747,760 6,921,144 10/884,881 7,092,112 7,192,106 11/039,866 7,173,739 6,986,560 7,008,033 11/148,237 7,222,780 7,270,391 7,150,510 11/478,599 11/499,749 11/521,388 11/738,518 11/482,981 11/743,662 11/743,661 11/743,659 11/743,655 11/743,657 11/752,900 11/926,109 11/927,163 11/929,567 7,195,328 7,182,422 11/650,537 11/712,540 10/854,521 10/854,522 10/854,488 7,281,330 10/854,503 10/854,504 10/854,509 7,188,928 7,093,989 10/854,497 10/854,495 10/854,498 10/854,511 10/854,512 10/854,525 10/854,526 10/854,516 7,252,353 10/854,515 7,267,417 10/854,505 10/854,493 7,275,805 7,314,261 10/854,490 7,281,777 7,290,852 10/854,528 10/854,523 10/854,527 10/854,524 10/854,520 10/854,514 10/854,519 10/854,513 10/854,499 10/854,501 7,266,661 7,243,193 10/854,518 10/854,517 10/934,628 7,163,345 7,322,666 11/601,757 11/706,295 11/735,881 11/748,483 11/749,123 11/766,061 11/775,135 11/772,235 11/778,569 11/829,942 11/870,342 11/935,274 11/937,239 11/961,907 11/961,940 11/961,961 11/014,731 D529081 D541848 D528597 6,924,907 6,712,452 6,416,160 6,238,043 6,958,826 6,812,972 6,553,459 6,967,741 6,956,669 6,903,766 6,804,026 7,259,889 6,975,429 10/636,234 10/636,233 7,301,567 10/636,216 7,274,485 7,139,084 7,173,735 7,068,394 7,286,182 7,086,644 7,250,977 7,146,281 7,023,567 7,136,183 7,083,254 6,796,651 7,061,643 7,057,758 6,894,810 6,995,871 7,085,010 7,092,126 7,123,382 7,061,650 10/853,143 6,986,573 6,974,212 7,307,756 7,173,737 10/954,168 7,246,868 11/065,357 7,137,699 11/107,798 7,148,994 7,077,497 11/176,372 7,248,376 11/225,158 7,306,321 7,173,729 11/442,132 11/478,607 11/503,085 11/545,502 11/583,943 11/585,946 11/653,239 11/653,238 11/764,781 11/764,782 11/779,884 11/845,666 11/872,637 11/944,401 11/940,215 11/544,764 11/544,765 11/544,772 11/544,773 11/544,774 11/544,775 11/544,776 11/544,766 11/544,767 11/544,771 11/544,770 11/544,769 11/544,777 11/544,768 11/544,763 11/293,804 11/293,840 11/293,803 11/293,833 11/293,834 11/293,835 11/293,836 11/293,837 11/293,792 11/293,794 11/293,839 11/293,826 11/293,829 11/293,830 11/293,827 11/293,828 7,270,494 11/293,823 11/293,824 11/293,831 11/293,815 11/293,819 11/293,818 11/293,817 11/293,816 11/838,875 11/482,978 11/640,356 11/640,357 11/640,358 11/640,359 11/640,360 11/640,355 11/679,786 11/872,714 10/760,254 10/760,210 10/760,202 7,201,468 10/760,198 10/760,249 7,234,802 7,303,255 7,287,846 7,156,511 10/760,264 7,258,432 7,097,291 10/760,222 10/760,248 7,083,273 10/760,192 10/760,203 10/760,204 10/760,205 10/760,206 10/760,267 10/760,270 7,198,352 10/760,271 7,303,251 7,201,470 7,121,655 7,293,861 7,232,208 7,328,985 10/760,261 7,083,272 7,261,400 11/474,272 11/474,315 7,311,387 11/583,874 7,303,258 11/706,322 11/706,968 11/749,119 11/749,157 11/779,848 11/782,590 11/855,152 11/855,151 11/870,327 11/934,780 11/935,992 11/951,193 12/017,327 12/015,273 12/036,882 11/014,764 11/014,763 7,331,663 11/014,747 7,328,973 11/014,760 11/014,757 7,303,252 7,249,822 11/014,762 7,311,382 11/014,723 11/014,756 11/014,736 11/014,759 11/014,758 11/014,725 7,331,660 11/014,738 11/014,737 7,322,684 7,322,685 7,311,381 7,270,405 7,303,268 11/014,735 11/014,734 11/014,719 11/014,750 11/014,749 7,249,833 11/758,640 11/775,143 11/838,877 11/944,453 11/944,633 11/955,065 12/003,952 12/007,818 12/007,817 12/071,187 11/014,769 11/014,729 7,331,661 11/014,733 7,300,140 11/014,755 11/014,765 11/014,766 11/014,740 7,284,816 7,284,845 7,255,430 11/014,744 7,328,984 11/014,768 7,322,671 11/014,718 11/014,717 11/014,716 11/014,732 11/014,742 11/097,268 11/097,185 11/097,184 11/778,567 11/852,958 11/852,907 11/872,038 11/955,093 11/961,578 12/022,023 12/023,000 12/023,018 12/031,582 12/043,708 11/293,820 11/293,813 11/293,822 11/293,812 11/293,821 11/293,814 11/293,793 11/293,842 11/293,811 11/293,807 11/293,806 11/293,805 11/293,810 11/688,863 11/688,864 11/688,865 11/688,866 11/688,867 11/688,868 11/688,869 11/688,871 11/688,872 11/688,873 11/741,766 12/014,767 12/014,768 12/014,769 12/014,770 12/014,771 12/014,772 12/014,773 12/014,774 12/014,775 12/014,776 12/014,777 12/014,778 12/014,779 12/014,780 12/014,781 12/014,782 12/014,783 12/014,784 12/014,785 12/014,787 12/014,788 12/014,789 12/014,790 12/014,791 12/014,792 12/014,793 12/014,794 12/014,796 12/014,798 12/014,801 12/014,803 12/014,804 12/014,805 12/014,806 12/014,807 61/034,147 11/482,982 11/482,983 11/482,984 11/495,818 11/495,819 11/677,049 11/677,050 11/677,051 11/872,719 11/872,718 61/033,357 7,306,320 11/934,781 D528156 10/760,180 7,111,935 10/760,213 10/760,219 10/760,237 7,261,482 10/760,220 7,002,664 10/760,252 10/760,265 7,088,420 11/446,233 11/503,083 11/503,081 11/516,487 11/599,312 6,364,451 6,533,390 6,454,378 7,224,478 6,559,969 6,896,362 7,057,760 6,982,799 11/202,107 11/743,672 11/744,126 11/743,673 7,093,494 7,143,652 7,089,797 7,159,467 7,234,357 7,124,643 7,121,145 7,089,790 7,194,901 6,968,744 7,089,798 7,240,560 7,137,302 11/442,177 7,171,855 7,260,995 7,260,993 7,165,460 7,222,538 7,258,019 11/543,047 7,258,020 11/604,324 7,334,480 11/706,305 11/707,056 11/744,211 11/767,526 11/779,846 11/764,227 11/829,943 11/829,944 12/015,390 12/031,475 6,454,482 6,808,330 6,527,365 6,474,773 6,550,997 7,093,923 6,957,923 7,131,724 10/949,288 7,168,867 7,125,098 11/706,966 11/185,722 7,249,901 7,188,930 11/014,728 11/014,727 D536031 D531214 7,237,888 7,168,654 7,201,272 6,991,098 7,217,051 6,944,970 10/760,215 7,108,434 10/760,257 7,210,407 7,186,042 10/760,266 6,920,704 7,217,049 10/760,214 10/760,260 7,147,102 7,287,828 7,249,838 10/760,241 10/962,413 10/962,427 7,261,477 7,225,739 10/962,402 10/962,425 10/962,428 7,191,978 10/962,426 10/962,409 10/962,417 10/962,403 7,163,287 7,258,415 7,322,677 7,258,424 10/962,410 7,195,412 7,207,670 7,270,401 7,220,072 11/474,267 11/544,547 11/585,925 11/593,000 11/706,298 11/706,296 11/706,327 11/730,760 11/730,407 11/730,787 11/735,977 11/736,527 11/753,566 11/754,359 11/778,061 11/765,398 11/778,556 11/829,937 11/780,470 11/866,399 11/223,262 11/223,018 11/223,114 11/955,366 7,322,761 11/223,021 11/223,020 11/223,019 11/014,730 D541849 29/279,123 6,716,666 6,949,217 6,750,083 7,014,451 6,777,259 6,923,524 6,557,978 6,991,207 6,766,998 6,967,354 6,759,723 6,870,259 10/853,270 6,925,875 10/898,214 7,095,109 7,145,696 10/976,081 7,193,482 7,134,739 7,222,939 7,164,501 7,118,186 7,201,523 7,226,159 7,249,839 7,108,343 7,154,626 7,079,292 10/980,184 7,233,421 7,063,408 10/983,082 10/982,804 7,032,996 10/982,834 10/982,833 10/982,817 7,217,046 6,948,870 7,195,336 7,070,257 10/986,813 10/986,785 7,093,922 6,988,789 10/986,788 7,246,871 10/992,748 10/992,747 7,187,468 10/992,828 7,196,814 10/992,754 7,268,911 7,265,869 7,128,384 7,164,505 7,284,805 7,025,434 7,298,519 7,280,244 7,206,098 7,265,877 7,193,743 7,168,777 11/006,734 7,195,329 7,198,346 7,281,786 11/013,363 11/013,881 6,959,983 7,128,386 7,097,104 11/013,636 7,083,261 7,070,258 7,083,275 7,110,139 6,994,419 6,935,725 11/026,046 7,178,892 7,219,429 6,988,784 11/026,135 7,289,156 11/064,005 7,284,976 7,178,903 7,273,274 7,083,256 7,325,986 7,278,707 7,325,918 6,974,206 11/064,004 7,066,588 7,222,940 11/075,918 7,018,025 7,221,867 7,290,863 7,188,938 7,021,742 7,083,262 7,192,119 11/083,021 7,036,912 7,175,256 7,182,441 7,083,258 7,114,796 7,147,302 11/084,757 7,219,982 7,118,195 7,229,153 6,991,318 7,108,346 11/248,429 11/239,031 7,178,899 7,066,579 11/281,419 20060087544 11/329,188 11/329,140 7,270,397 7,258,425 7,237,874 7,152,961 7,333,235 7,207,658 11/484,744 7,311,257 7,207,659 11/525,857 11/540,569 11/583,869 11/592,985 11/585,947 7,306,307 11/604,316 11/604,309 11/604,303 11/643,844 7,329,061 11/655,940 11/653,320 7,278,713 11/706,381 11/706,323 11/706,963 11/713,660 7,290,853 11/696,186 11/730,390 11/737,139 11/737,749 11/740,273 11/749,122 11/754,361 11/766,043 11/764,775 11/768,872 11/775,156 11/779,271 11/779,272 11/829,938 11/839,502 11/858,852 11/862,188 11/859,790 11/872,618 11/923,651 11/950,255 11/930,001 11/955,362 12/015,368 11/965,718 6,485,123 6,425,657 6,488,358 7,021,746 6,712,986 6,981,757 6,505,912 6,439,694 6,364,461 6,378,990 6,425,658 6,488,361 6,814,429 6,471,336 6,457,813 6,540,331 6,454,396 6,464,325 6,443,559 6,435,664 6,412,914 6,488,360 6,550,896 6,439,695 6,447,100 09/900,160 6,488,359 6,637,873 10/485,738 6,618,117 10/485,737 6,803,989 7,234,801 7,044,589 7,163,273 6,416,154 6,547,364 10/485,744 6,644,771 7,152,939 6,565,181 7,325,897 6,857,719 7,255,414 6,702,417 7,284,843 6,918,654 7,070,265 6,616,271 6,652,078 6,503,408 6,607,263 7,111,924 6,623,108 6,698,867 6,488,362 6,625,874 6,921,153 7,198,356 6,536,874 6,425,651 6,435,667 10/509,997 6,527,374 7,334,873 6,582,059 10/510,152 6,513,908 7,246,883 6,540,332 6,547,368 7,070,256 6,508,546 10/510,151 6,679,584 7,303,254 6,857,724 10/509,998 6,652,052 10/509,999 6,672,706 10/510,096 6,688,719 6,712,924 6,588,886 7,077,508 7,207,654 6,935,724 6,927,786 6,988,787 6,899,415 6,672,708 6,644,767 6,874,866 6,830,316 6,994,420 6,954,254 7,086,720 7,240,992 7,267,424 7,128,397 7,084,951 7,156,496 7,066,578 7,101,023 11/165,027 11/202,235 11/225,157 7,159,965 7,255,424 11/349,519 7,137,686 7,201,472 7,287,829 11/504,602 7,216,957 11/520,572 11/583,858 11/583,895 11/585,976 11/635,488 7,278,712 11/706,952 11/706,307 7,287,827 11/944,451 11/740,287 11/754,367 11/758,643 11/778,572 11/859,791 11/863,260 11/874,178 11/936,064 11/951,983 12/015,483 6,916,082 6,786,570 10/753,478 6,848,780 6,966,633 7,179,395 6,969,153 6,979,075 7,132,056 6,832,828 6,860,590 6,905,620 6,786,574 6,824,252 7,097,282 6,997,545 6,971,734 6,918,652 6,978,990 6,863,105 10/780,624 7,194,629 10/791,792 6,890,059 6,988,785 6,830,315 7,246,881 7,125,102 7,028,474 7,066,575 6,986,202 7,044,584 7,210,762 7,032,992 7,140,720 7,207,656 7,285,170 11/048,748 7,008,041 7,011,390 7,048,868 7,014,785 7,131,717 7,284,826 7,331,101 7,182,436 7,104,631 7,240,993 7,290,859 11/202,217 7,172,265 7,284,837 7,066,573 11/298,635 7,152,949 7,334,877 11/442,133 7,326,357 7,156,492 11/478,588 7,331,653 7,287,834 11/525,861 11/583,939 11/545,504 7,284,326 11/635,485 11/730,391 11/730,788 11/749,148 11/749,149 11/749,152 11/749,151 11/759,886 11/865,668 11/874,168 11/874,203 11/971,182 12/021,086 12/015,441 11/965,722 6,824,257 7,270,475 6,971,811 6,878,564 6,921,145 6,890,052 7,021,747 6,929,345 6,811,242 6,916,087 6,905,195 6,899,416 6,883,906 6,955,428 7,284,834 6,932,459 6,962,410 7,033,008 6,962,409 7,013,641 7,204,580 7,032,997 6,998,278 7,004,563 6,910,755 6,969,142 6,938,994 7,188,935 10/959,049 7,134,740 6,997,537 7,004,567 6,916,091 7,077,588 6,918,707 6,923,583 6,953,295 6,921,221 7,001,008 7,168,167 7,210,759 7,337,532 7,331,659 7,322,680 6,988,790 7,192,120 7,168,789 7,004,577 7,052,120 11/123,007 6,994,426 7,258,418 7,014,298 7,328,977 11/177,394 7,152,955 7,097,292 7,207,657 7,152,944 7,147,303 7,338,147 7,134,608 7,264,333 7,093,921 7,077,590 7,147,297 20060038853 11/248,832 11/248,428 11/248,434 7,077,507 7,172,672 7,175,776 7,086,717 7,101,020 11/329,155 7,201,466 11/330,057 7,152,967 7,182,431 7,210,666 7,252,367 7,287,837 11/485,255 11/525,860 6,945,630 7,018,294 6,910,014 6,659,447 6,648,321 7,082,980 6,672,584 7,073,551 6,830,395 7,289,727 7,001,011 6,880,922 6,886,915 6,644,787 6,641,255 7,066,580 6,652,082 7,284,833 6,666,544 6,666,543 6,669,332 6,984,023 6,733,104 6,644,793 6,723,575 6,953,235 6,663,225 7,076,872 7,059,706 7,185,971 7,090,335 6,854,827 6,793,974 10/636,258 7,222,929 6,739,701 7,073,881 7,155,823 7,219,427 7,008,503 6,783,216 6,883,890 6,857,726 10/636,274 6,641,256 6,808,253 6,827,428 6,802,587 6,997,534 6,959,982 6,959,981 6,886,917 6,969,473 6,827,425 7,007,859 6,802,594 6,792,754 6,860,107 6,786,043 6,863,378 7,052,114 7,001,007 10/729,151 10/729,157 6,948,794 6,805,435 6,733,116 10/683,006 7,008,046 6,880,918 7,066,574 6,983,595 6,923,527 7,275,800 7,163,276 7,156,495 6,976,751 6,994,430 7,014,296 7,059,704 7,160,743 7,175,775 7,287,839 7,097,283 7,140,722 11/123,009 11/123,008 7,080,893 7,093,920 7,270,492 7,128,093 7,052,113 7,055,934 11/155,627 7,278,796 11/159,197 7,083,263 7,145,592 7,025,436 11/281,444 7,258,421 11/478,591 7,332,051 7,226,147 11/482,940 7,195,339 11/503,061 11/505,938 7,284,838 7,293,856 11/544,577 11/540,576 7,325,901 11/592,991 11/599,342 11/600,803 11/604,321 11/604,302 11/635,535 11/635,486 11/643,842 11/655,987 11/650,541 11/706,301 11/707,039 11/730,388 11/730,786 11/730,785 11/739,080 7,322,679 11/768,875 11/779,847 11/829,940 11/847,240 11/834,625 11/863,210 11/865,680 11/874,156 11/923,602 11/951,940 11/954,988 11/961,662 12/015,178 12/015,157 12/017,305 12/017,926 12/015,261 12/025,605 12/03,164 7,067,067 6,776,476 6,880,914 7,086,709 6,783,217 7,147,791 6,929,352 7,144,095 6,820,974 6,918,647 6,984,016 7,192,125 6,824,251 6,834,939 6,840,600 6,786,573 7,144,519 6,799,835 6,959,975 6,959,974 7,021,740 6,935,718 6,938,983 6,938,991 7,226,145 7,140,719 6,988,788 7,022,250 6,929,350 7,011,393 7,004,566 7,175,097 6,948,799 7,143,944 7,310,157 7,029,100 6,957,811 7,073,724 7,055,933 7,077,490 7,055,940 10/991,402 7,234,645 7,032,999 7,066,576 7,229,150 7,086,728 7,246,879 7,284,825 7,140,718 7,284,817 7,144,098 7,044,577 7,284,824 7,284,827 7,189,334 7,055,935 7,152,860 11/203,188 11/203,173 7,334,868 7,213,989 11/225,156 11/225,173 7,300,141 7,114,868 7,168,796 7,159,967 7,328,966 7,152,805 11/298,530 11/330,061 7,133,799 11/330,054 11/329,284 7,152,956 7,128,399 7,147,305 7,287,702 7,325,904 7,246,884 7,152,960 11/442,125 11/454,901 11/442,134 11/450,441 11/474,274 11/499,741 7,270,399 6,857,728 6,857,729 6,857,730 6,989,292 7,126,216 6,977,189 6,982,189 7,173,332 7,026,176 6,979,599 6,812,062 6,886,751 10/804,057 10/804,036 7,001,793 6,866,369 6,946,743 7,322,675 6,886,918 7,059,720 7,306,305 10/846,562 7,334,855 10/846,649 10/846,627 6,951,390 6,981,765 6,789,881 6,802,592 7,029,097 6,799,836 7,048,352 7,182,267 7,025,279 6,857,571 6,817,539 6,830,198 6,992,791 7,038,809 6,980,323 7,148,992 7,139,091 6,947,173 7,101,034 6,969,144 6,942,319 6,827,427 6,984,021 6,984,022 6,869,167 6,918,542 7,007,852 6,899,420 6,918,665 6,997,625 6,988,840 6,984,080 6,845,978 6,848,687 6,840,512 6,863,365 7,204,582 6,921,150 7,128,396 6,913,347 7,008,819 6,935,736 6,991,317 7,284,836 7,055,947 7,093,928 7,100,834 7,270,396 7,187,086 7,290,856 7,032,825 7,086,721 7,159,968 7,010,456 7,147,307 7,111,925 11/144,812 7,229,154 11/505,849 11/520,570 7,328,994 7,341,672 11/540,575 11/583,937 7,278,711 7,290,720 7,314,266 11/635,489 11/604,319 11/635,490 11/635,525 7,287,706 11/706,366 11/706,310 11/706,308 11/785,108 11/744,214 11/744,218 11/748,485 11/748,490 11/764,778 11/766,025 11/834,635 11/839,541 11/860,420 11/865,693 11/863,118 11/866,307 11/866,340 11/869,684 11/869,722 11/869,694 11/876,592 11/945,244 11/951,121 11/945,238 11/955,358 11/965,710 11/962,050 12/015,478 12/015,423 12/015,434 12/023,015 12/030,755 12/025,641 12/036,279 12/031,598

BACKGROUND OF THE INVENTION

An integrated circuit fabricated on the silicon wafer is often referred to as a ‘die’. For the purposes of this specification, the term die will be used as a reference to an integrated circuit fabricated on a wafer substrate using lithographic the well known etching and deposition techniques commonly used in semiconductor fabrication. Integrated circuit (IC) dies are electrically connected to printed circuit boards by wire bonds. The wire bonds are very thin wires—around 25 to 40 microns in diameter—extending from contact pads along the side of the wafer substrate to contacts on the printed circuit board (PCB). Wire bonding is a widely used electrical interconnection technique because of the speed and accuracy of modern wire bonding machines, commonly referred to as wire bonders.

Wire bonders are automated devices that weld small lengths of wire from conductors on the PCB to the contact pads on an integrated circuit die. Wire is fed through a bonding tool that uses some combination of pressure, heat and/or ultra-sonic energy to attach the wire to the bond pads via a solid phase welding process. The two most common types of wire bonder are referred to as wedge bond and ball bond. These refer to the bonding tool and the configuration of the wire bond itself. With both types of wire bonders, the individual wire bonds extend in an arc from the bond pad on the integrated circuit (IC) die to the conductor on the PCB. This is because wires from the contact pads to the PCB are made longer than necessary to accommodate changes in the gap between the PCB and the bonds pads due to thermal expansion, flex in the components and so on.

To protect and strengthen the wire bonds, they are sealed within a bead of epoxy called encapsulant. The top of the wire arc is often about 300 microns above the contact pads although some wire bonding may extend even higher. As the name suggests, the encapsulant needs to encapsulate the full length of the wire so the encapsulant bead will extend 500 microns to 600 microns proud of the contact pads.

If the die is purely an electronic microprocessor, there is little need to keep close control of the encapsulant bead dimensions. However, if the die is a micro-electro mechanical systems (MEMS) device with an active upper surface, it may be necessary or desirable to bring the active surface of the die onto close proximity with another surface. One such situation applies to inkjet print heads. The proximity of the print media to the nozzle array influences the print quality. Similarly, if a cleaning surface is wiped across the nozzles, the bead of encapsulant can hamper the wiping contact.

Another problems arises because of sides of the encapsulant bead are not straight. One commonly used technique for depositing the encapsulant involves extruding it from a needle directly onto the line of wire bonds. The encapsulant volume and placement on the die is not very accurate. Variations in the pressure from the pump or slight non-uniformities in the speed of the needle cause the side of the bead contacting the active surface to be reasonably crooked. As the side of the bead is not straight, it has to be generously spaced from any active parts on the active surface to comfortably accommodate the perturbations. Spacing the electrical contacts away from the active portions (say for example, inkjet nozzles) of the active surface uses up valuable wafer real estate and reduces the number of dies that can be fabricated from a wafer disc.

In light of the widespread use of inkjet print heads, the invention will be described with specific reference to its application in this field. However, the ordinary worker will appreciate that this is purely illustrative and the invention is equally applicable to other integrated circuits wire bonded to a PCB or other support structure.

SUMMARY OF THE INVENTION

According to a first aspect, the present invention provides a method of profiling a series of wire bonds between a line of contact pads on a die, and a corresponding set of conductors on a supporting structure, the method comprising the steps of:

electrically connecting each of the contact pads on the die to a corresponding conductor on the supporting structure with a respective wire bond, each of the wire bonds extending in an arc from the contact pad to the conductor; and,

pushing on each of the wire bonds individually to collapse the arc and plastically deform the wire bond such that the plastic deformation maintains the wire bond in a flatter profile shape.

The strength of the wire bond is known to be relatively small; of the order of 3 to 5 grams force. However, the Applicant's work has found that the wire bond structure is robust enough to withstand a certain degree of work hardening from plastic deformation. The arc of the wire bond can be deformed into a flatter profile without compromising the electrical connection with the PCB. The Applicant's above referenced U.S. Ser. No. 11/860,539 discloses a technique for simultaneously pushing some or all of the wire loops in the line of wire bonds. This so called gang wire pushing technique is effective but further development has shown that individually collapsing each wire bond is more controlled and easier to implement in a high volume manufacturing process.

Preferably, adjacent wire bonds in the line of wire bonds are sequentially pushed. In a further preferred form, the step of forming the line of wire bonds uses a wire bonder that has a bonding tool for moving between the contacts pads and their respective corresponding conductors, and the line of wires bonds are sequentially pushed by a wire engaging structure on the wire bonder. Preferably, the wire engaging structure and the bonding tools are configured for synchronized movement. Preferably, the wire engaging structure pushes the wire bond immediately adjacent the wire bond currently being formed by the bonding tool. Preferably, the wire bonder is a wedge type wire bonder and the bonding tool is a wedge with a wire clamp at a distal end such that during use, the wire clamp holds a piece of wire in contact with one of the contact pads on the die to form a weld connection before moving to the corresponding conductor on the PCB to weld the other end of the wire and formal wire bond, and the wire engaging structure has a wire pushing surface that contacts the wire bond, the wire pushing surface is adjacent to, and 1.0 mm to 1.6 mm behind the wire clamp with respect to the movement of the wedge towards the IC die. In a particularly preferred form, the wire pushing surface is between 50 microns to 400 microns closer to the PCB and the wire clamp. In some embodiments, the line of wire bonds does not extend more than 150 microns above the contact pads of the IC die. In preferred embodiments, the line of wire bonds does not extend more than 50 microns above the contact pads of the IC die. In a particularly preferred form, the wire bonds are attached to the contact pads with a bond strength greater than 3 g force.

Preferably the contact pads are spaced from the corresponding conductors on the PCB by more than 1 mm. In a further preferred form, the contact pads are between 2 mm and 3 mm from the corresponding conductors on the PCB. In some embodiments, the PCB has a support structure and the flex PCB and need to the support structure such that the conductors are adjacent the contact pads on the die. In particular embodiments, the support structure has a chip mounting area for supporting the die, the die having a back surface in contact with the chip mounting area and an active surface opposing the back surface, the active surface having the contact pads, and the chip mounting area being raised relative to the remainder of the support structure such that the contact pads are raised relative to the conductors. In a particularly preferred form, the support structure is a liquid crystal polymer (LCP) molding. Preferably, the active surface has functional elements spaced less than 260 microns from the contacts pads of the die. In a particularly preferred form, the die is an inkjet print head IC and the functional elements are nozzles through which ink is ejected. In some embodiments, the support structure is a liquid crystal polymer (LCP) molding.

Preferably, the wire bonds are covered in a bead of encapsulant, the bead of encapsulant extending less than 200 microns above the active surface of the die.

Preferably, the wire bonds are covered in a bead of encapsulant, the bead of encapsulant having a profiled surface that is flat, parallel to and spaced less than 100 microns from the active surface.

Preferably, the line of wire bonds are covered in a bead of encapsulant, the bead of encapsulant having a profiled surface that is flat and inclined relative to the active surface.

Preferably, the wire bonds are covered in a bead of encapsulant, the encapsulant being an epoxy material that is thixotropic when uncured.

Preferably, the wire bonds are covered in a bead of encapsulant, the encapsulant being an epoxy material has a viscosity greater than 700 cp when uncured.

In a particular embodiment, the print head IC is mounted in a printer such that during use the nozzles are less than 100 microns from the paper path.

According to a second aspect, the present invention provides a wire bonder for electrically connecting an integrated circuit die with conductors on a printed circuit board, the wire bonder comprising:

a bonding tool for attaching wire bonds from the integrated circuit die to the conductors of the printed circuit board; and,

a wire engaging structure for deforming the wire bonds.

Preferably, the wire engaging structure pushes on the wire bonds to plastically deform them.

Preferably, the wire engaging structure is configured to push the wire bonds onto an adhesive surface positioned between the integrated circuit and the conductors of the printed circuit board.

Preferably, the wire engaging structure is flexible relative to the bonding tool.

Preferably, the wire engaging structure is configured for synchronized movement with the bonding tool.

Preferably, the bonding tool moves from the integrated circuit to the conductors when forming one of the wire bonds and the wire engaging structure has a wire pushing surface positioned 1.0 mm to 1.6 mm behind the bonding tool with respect to its direction of movement when forming the wire bonds.

Preferably, the integrated circuit die is mounted to a supporting surface and the wire pushing surface is 50 microns to 400 microns closer to the supporting surface than the bonding tool. Preferably, the wire bonder is a wedge type wire bonder and the bonding tool is a wedge with a wire clamp at a distal end such that during use, the wire clamp holds a piece of wire in contact with one of the contact pads on the die to form a weld connection before moving to the corresponding conductor on the PCB to weld the other end of the wire and formal wire bond. Preferably, the wire pushing surface is formed from a material that has a hardness less than that of the wire bonds.

Preferably, the wire bonds are formed from lengths of wire with a gauge between 15 microns and 75 microns. In a particularly preferred form, the gauge is about 25 microns.

In some embodiments, the wire bonds attach to respective contact pads on the IC die and the wire bonds do not extend more than 150 microns above the contact pads of the IC die. In preferred embodiments, the line of wire bonds does not extend more than 50 microns above the contact pads of the IC die.

Preferably the contact pads are spaced from the corresponding conductors on the PCB by more than 1 mm. In a further preferred form, the contact pads are between 2 mm and 3 mm from the corresponding conductors on the PCB. In some embodiments, the PCB has a support structure and the flex PCB and need to the support structure such that the conductors are adjacent the contact pads on the die. In particular embodiments, the support structure has a chip mounting area for supporting the die, the die having a back surface in contact with the chip mounting area and an active surface opposing the back surface, the active surface having the contact pads, and the chip mounting area being raised relative to the remainder of the support structure such that the contact pads are raised relative to the conductors. In a particularly preferred form, the support structure is a liquid crystal polymer (LCP) molding. Preferably, the active surface has functional elements spaced less than 260 microns from the contacts pads of the die. In a particularly preferred form, the die is an inkjet print head IC and the functional elements are nozzles through which ink is ejected. In some embodiments, the support structure is a liquid crystal polymer (LCP) molding.

According to a third aspect, the present invention provides an electronic device comprising:

an integrated circuit die with a plurality of contacts pads;

a printed circuit board with a plurality of conductors corresponding to each of the contact pads respectively;

wire bonds electrically connecting each of the contact pads to the corresponding conductors; and,

an adhesive surface positioned between the contacts pads and the corresponding conductors; wherein,

the wire bonds are secured to the adhesive surface.

According to a fourth aspect, the present invention provides a method of reducing wire bond loop heights in wire bonds electrically connecting an integrated circuit die with a contact pad to a printed circuit board with a conductor, the method comprising the steps of:

mounting the integrated circuit die such that the contact pad is spaced from the conductor;

positioning an adhesive surface between the contact pad and the conductor on the printed circuit board;

attaching wire to one of the contact pad or the conductor;

drawing the wire towards the other of the contact pad or the conductor;

allowing the wire to contact the adhesive surface; and,

attaching the wire to the other of the contact pad of the conductor to form a wire bond adhered to the adhesive surface and a point intermediate its ends.

These aspects of the invention are placed on the realization that wire bonds can be adhered to an underlying supporting structure without detrimental effects to their bond strength or function. Adhering the wire bonds between their ends provides a reliable and control production in the wire bond loop height. The resulting wire bond heights can be smaller than that achieved by inducing plastic deformation as the individual wire is unable to spring back up when the wire engaging structure disengages. It will be appreciated that plastically deforming a wire bond also involves initially elastically deforming the wire. The elastic deformation is removed when the wire pushing structure is retracted.

The wire bond can be adhered while the bonds are being formed by the wire bonder without any modification to the bonding tool. The applicant has found that wire bond is will typically allow the wire to touch the surface between the die and the conductors on the printed circuit board as the bond is being formed. Once the wire has been welded to the contact pad on the die, the bonding tool draws is towards the conductors on the printed circuit board. As it is drawn across the gap between the die and printed circuit board, the wire drapes downwardly and rests on the underlying surface. The only once the bonding tool has welded the other end of the wire to the conductor, and the wire clamp immediately behind the bonding tool breaks off the feed wire by pulling until tensile failure, does residual tension in the loop cause it to bow upwards. If the wire is brought down to touch an adhesive surface before the ultrasonic weld on the printed circuit board, it is not able to bow upwards.

Preferably, the wire bond is moved into contact with the adhesive surface by a wire bonder is the wire bond is being formed.

Preferably, the adhesive surface is one side of a double-sided adhesive tape. Preferably, the integrated circuit die and the PCB are mounted to a supporting structure such that they are adjacent and spaced from each other. Preferably, the PCB is a flexible PCB and the supporting structure is a liquid crystal polymer (LCP) molding. Preferably, the integrated circuit die is mounted to the supporting structure by a die attach film, and the adhesive surface is provided by a portion of the die attach film.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described by way of example only with reference to the accompanying drawings, in which:

FIG. 1 is a schematic representation of a common prior art technique for applying a bead of encapsulant to wire bonds;

FIG. 2 is a schematic representation of a die mounted to a supporting structure with a chip mounting area raised relative to the flex PCB mounting area;

FIGS. 3A, 3B and 3C are schematic representations of the encapsulant bead being profiled into a desired shape using a moveable blade;

FIGS. 4A to 4D are schematic representations of wire bonds being profiled by plastic deformation;

FIGS. 5A and 5B show the encapsulant bead height reductions for plastically deformed wire bonds;

FIGS. 6A to 6C show the encapsulant bead being applied to the wire bonds using the profiling blade;

FIGS. 7A and 7B show the profiling blade being used to control the encapsulant bead front on the surface of the die;

FIG. 8 shows the wire pusher mounted to the wire bonder;

FIG. 9 shows the wire pusher and the wire bonder in profile; and,

FIG. 10 shows the wire bonds adhered to the LCP molding between the die and the flex PCB.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

FIG. 1 shows a common technique used for applying a bead encapsulant to wire bonds. A die 4 is mounted to a supporting structure 6 adjacent the edge of a flex PCB 8 (flexible printed circuit board). The die 4 has a line of contact pads 10 along one edge and the flex PCB 8 has corresponding bond pads 12. Wire bonds 16 extend from the bond pads 10 to the bonds pads 12. Power and data is transmitted to the die 4 via conductive traces 14 in the flex PCB 8. This is a simplified representation of the dies mounted within many electronic devices. The print head IC dies mounted to the LCP (liquid crystal polymer) molding to receive print data from an adjacent flex PCB, as described in U.S. Ser. No. 11/014769 incorporated herein by cross reference, is one example of this type of die mounting arrangement. The ordinary worker will appreciate that the die may also be mounted directly to a hard PCB with traces formed thereon.

The wire bonds 16 are covered in a bead on encapsulant 2 to protect and reinforce the bonds. The encapsulant 2 is dispensed from a discharge needle 18 directly onto the wire bonds 16. Often the encapsulant bead 2 is three separate beads—two beads of so-called ‘dam’ encapsulant 20, and one bead of ‘fill’ encapsulant 22. The dam encapsulant 20 has a higher viscosity than the fill encapsulant 22, and serves to form a channel to hold the fill encapsulant bead. The height H of the bead 2 above the die 4 is usually about 500-600 microns. In most electronic devices, this does not pose a problem. However, if the die has an active surface that needs to operate in close proximity to another surface, this bead can be an obstruction.

Elevating the Die Relative to the Flex PCB

FIG. 2 shows a stepped support structure 6 that has raised the chip mounting area 26 relative to the PCB mounting area 24 (or at least the area mounting the PCB bonds pads 12). With the die 4 on a raised chip mounting area 26, the arc of the wire bonds 16 are lower relative to active surface 28 of the die 4. In fact, the end of the wire bond 16 attached to the contact pad 10 can be the apex of the arc (bearing in mind that the wire bond arc is intended to accommodate some relative movement of the die and PCB). When the wire bonds 16 are covered with encapsulant 2, the bead has a reduced height H above the active surface 28 of the die 4. If the bead of encapsulant 2 uses two beads of dam encapsulant 24 and a fill encapsulant 22, the positions, volumes and viscosities of the beads need to take the step into account. Bead heights less than 100 microns are easily achievable, and with additional measures, such as wire arc collapsing and bead profiling (discussed below), bead height of less than 50 microns are possible.

With the die 4 raised above the flex PCB 8 by 410 microns, the height of the wire bonds 16 above the die is about 34 microns. With the die raised 610 microns above the flex PCB, the wire bond height is around 20 microns. Raising the die even further has shown little or no further reduction in wire bond height with a step of 710 microns having a wire bond height of around 20 microns.

Shaping the Encapsulant Bead with a Profiling Blade

FIGS. 3A to 3C show the encapsulant 2 being profiled with a profiling blade 30. The support structure 6 is again stepped to reduce the height of the wire bonds 16 above the die 4. Before the epoxy encapsulant 2 has cured, the profiling blade 30 moves across the die 4 and wire bonds in a predetermined path. As shown in FIG. 3B, the blade 30 displaces the top of the bead 30 to its flex PCB side to form a flat top surface 32 that is at a significantly reduced height H above the die 4.

The encapsulant bead 2 may be a plurality of separate beads as shown in FIGS. 1 and 2, or a single bead of one material. However, for close dimensional control of the profiled encapsulant, the encapsulant materials used should be thixotropic—that is, once deposited from the discharge needle, or profiled by the blade 30, the material should not flow under its own weight, but rather hold its form until it cures. This requires the epoxy to have an uncured viscosity greater than about 700 cp. A suitable encapsulant is DYMAX 9001-E-v3.1 Chip Encapsulant produced by Dymax Corporation with a viscosity of approximately 800 cp when uncured. The blade 30 may be ceramic (glass) or metal and preferably about 200 microns thick.

It will be appreciated that the relative movement of the blade 30 and the die 4 can be precisely controlled. This allows the height H to be determined by the tolerance of the wire bonding process. As long as H is greater than the nominal height of the wire bond arc above the die, plus the maximum tolerance, the encapsulant 2 will cover and protect the wire bonds 16. With this technique, the height H can be easily reduced from 500-600 microns to less than 300 microns. If the heights of the wire bond arcs are also reduced, the height H of the encapsulant bead can be less than 100 microns. The Applicant uses this technique to profile encapsulant on print head dies down to a height of 50 microns at its lowest point. As shown in FIG. 3C, the lowest point is at the encapsulant front and the blade 30 forms an inclined face 32 in the top of the bead 2. The inclined face is utilized by the print head maintenance system when cleaning the paper dust and dried ink from the nozzle face. This illustrates the technique's ability to not just reduce the height of the encapsulant bead, but to form a surface that can perform functions other than just encapsulate the wire bonds. The edge profile of the blade and the path of the blade relative to the die can be configured to form a surface that has a multitude of shapes for a variety of purposes.

Plastic Deformation of the Wire Bond Arcs

FIGS. 4A to 4C show another technique for lowering the profile of wire bonds. FIG. 4A shows the die 4 connected to the flex PCB 8 via the wire bonds 16. While the stepped support structure 6 has lowered the height of the wire bond arcs compared to a flat supporting structure, the wire bonds still have a natural tendency to bow upwards rather than downwards towards the corner of the step. The wires 16 are typically about 32 microns in diameter and have a pull force of about 3 to 5 grams force. The pull force is the tensile load necessary to break the connection to the contact pad 10 or the bond pad 12. Given the fragility of these structures (one of the reasons encapsulant is applied), conventional wisdom is to avoid any contact between the wire bond arcs and other solid surfaces.

As shown in FIG. 4B, the arc of the wire bonds 16 can be collapsed by a wire pusher 34. The wire pusher 34 displaces the wire bond 16 enough to elastically and plastically deform the arc. The Applicants have shown that contact with the wire pusher 34 can cause localized work hardening in the wire, but as long as the pushing force is not excessive, it does not break. The end of the wire pusher 34 is rounded to avoid stress concentration points. The wire pusher may be a stylus for engaging single wire bonds or a blade that pushes on multiple wire bonds simultaneously.

Referring now to FIG. 4C, the wire pusher 34 is retracted and the wire springs back toward its original shape to relieve the elastic deformation. However, the plastic deformation remains and the wire bond height above the die 4 is much reduced. Testing has shown that an initial wire bond loop height of 200 microns can be reduced to about 35 microns using this technique. Tests have also shown that the pull strength of the plastically deformed wires remains at about 3 to 5 grams force.

The collapse of the wire bonds is uncontrolled and leaves the wire bonds somewhat randomly deformed. However, pushing the wire bonds closer to the die provides more uniformly shaped collapsed wire bonds. The Applicant's work has shown that engaging the wires about 200 to 300 microns for the die provides the best results.

As shown in FIG. 4D, the die 4 and the flex PCB 8 are mounted to a flat support structure 6. As discussed above, this means the original loop height of the wire bond arc is much higher—approximately 400 microns above the die 4. Consequently, the wire has more plastic deformation when the loop is collapsed by the wire pusher. Even so, the Applicants results show that the residual loop height after pushing is about 20-50 microns.

FIGS. 5A and 5B show the collapsed wire bonds 16 covered with an encapsulant bead 2. Even without bead profiling prior to curing, the height H of the bead above the die is much less than the bead necessary to encapsulate the original undeformed wire loops.

Applying Encapsulant with Profiling Blade

FIGS. 6A, 6B and 6C show the application of the encapsulant bead using the profiling blade 30 instead of a discharge needle (see FIGS. 1 and 2). As previously discussed, the flowrate of encapsulant from the discharge needle can vary and this gives rise to large variations on the position of the encapsulant front on the active surface of the die 4. Consequently, any functional elements in the active surface of the die need to be sufficiently spaced from the contacts pads 10 to allow for the meandering encapsulant front.

Applying the encapsulant with the profiling blade avoids the problems caused by the flowrate fluctuations from the discharge needle. As shown in FIG. 6A, the bead of encapsulant 40 can be formed on the profiling blade 30 by simply dipping it into a reservoir of uncured encapsulant epoxy. Of course, the bead 40 may also be formed by any other convenient method, such as running the discharge needle along one end of the blade 30.

FIG. 6B show the blade 30 having been lowered to touch the bead 40 onto the die 4. When the encapsulant material touches the die surface, it wets and wicks along the surface while remaining pinned to the edge of the blade. The blade 30 is held at a predetermined height above the die 4 and moved over the bead 2 to flatten and lower its profile. The encapsulant displaced from the top of the bead 2 by the blade 30, spreads over the PCB side of the bead 2. It is not relevant if the encapsulant spreads further over the PCB than necessary. As long as the wire bonds 16 and the bonds pads 12 are covered, any additional encapsulant on the PCB 8 surface is not detrimental.

In FIG. 6C, the wire bond 16 height has been reduced by collapsing the arc in accordance with the techniques discussed above. As previously discussed, the bead 2 deposited by the discharge needle need not be as big to cover the wire bond 16 once it has been collapsed. Furthermore, the blade 30 can be brought closer to the die 4 without contacting wire bonds 16 when profiling the encapsulant 2. Hence the bead profile in FIG. 6C is substantially lower than that of FIG. 6B.

Encapsulant Front Control

When the encapsulant material is dispensed from the discharge needle, minor variations in the flowrate can cause the bead to bulge at points of higher flow. Consequently, the side of the bead that contacts the active surface of the die is not straight, but has significant perturbations. These perturbations have to be accommodated between the contact pads and any functional elements on the active surface. The spacing between the contacts pads and the functional elements consumes valuable ‘chip real estate’. The Applicant has previously developed print head dies with a spacing of 260 microns between the contact pads and the first row of nozzles. Better control of the encapsulant front reduces the space between the contacts and operational elements, and so the overall dimensions of the die. Hence the design can be more compact and more chips fabricated from the original wafer disc.

As shown in FIGS. 7A and 7B, the profiling blade 30 is used to control the front 36 of the bead of encapsulant 2. The blade 30 is positioned over the die 4 to define a gap 42 between its lower edge and the active surface 28. As the discharge needle 18 dispenses the encapsulant material 44, it flows onto the active surface, one side of the blade and a fillet of the material extends through the gap 42. Because of the flow restriction created by the gap, flow variations have a reduced effect on the dimensions of the fillet that flows through the gap. Therefore the encapsulant front 36 closely corresponds to the line of the lower edge of the blade 30.

As shown in FIG. 7B, the profiling blade 30 is already in position to profile the encapsulant bead 2 once it has been dispensed from the discharge needle. The blade 30 simply moves over the die 4 in a direction away from the nozzles 38. This keeps the encapsulant front 36 in place and flattens the profile of the encapsulant bead 2 over the wire bonds 16.

Collapsing the Wire Bonds Arcs with the Wirebonder

FIGS. 8 and 9 show a technique for individually deforming each of the wire bond arcs using the wire bonder. This has several advantages over the technique shown in FIGS. 4A to 4C described in the “PLASTIC DEFORMATION OF THE WIRE BOND ARCS ” section above. Firstly, deforming the wire bonds as they are being attached by the wire bonder is more time efficient than pushing the line of wire bonds as a separate production step. Secondly, it has been found that individually engaging and deforming each wire in the line of wire bonds provides uniform results in terms of wire deformation and bond strength.

FIG. 8 is a schematic perspective of a wire bonder 46 forming the individual wire bonds 16 between the contact pads 10 and the conductors 12 on the flex PCB 8. The print head IC 4 is shown adhered to one side of the die attach film 58. In turn, the die attach film 58 is attached to the LCP molding 6. Laser ablated holes through the die attach film 58 feed ink to the array of nozzles 38. The LCP molding six has a stepped surface 60 so that the print head IC 4 is raised relative to the flex PCB eight. As discussed above this helps to reduce the height of the wire bonds 16.

The wire bonder 46 is commonly known in the industry as a “wedge type” wire bonder. The wedge 48 receives a stock of feed wire 56 at its tip. Using some combination of pressure, heat and ultrasonic energy, the end of the wire bond 16 is welded to one of the conductors 12 on the flex PCB 8, or one of the contact pads 10 on the print head integrated circuit 4. FIG. 8 includes an enlarged inset showing the connection between the wire bond 16 and the conductor 12. The end of the wire has a flatten section 54 created by the tip of wedge 48. Adjacent to flatten section 54 is a neck portion 52 where the wire 16 transitions to its circular cross section. This neck section of the wire is work hardened and particularly prone to plastic deformation. In light of the greater propensity for plastic deformation at the neck portion 52, the wire bonder 46 is fitted with a wire engaging structure 50 pushes on the wire bond 16 in this region. However, the wire engaging structure 50 to not contact the wire bonds 16 too close to the neck portion 52 is this can break the wire. The skilled worker will appreciate the work hardening increases the brittleness of the metal. The applicant's testing has found that positioning the wire engaging structure 50 so that its tip is between 1.0 mm and 1.6 mm behind the tip of the wedge (with respect to its movement from the die to the flex) and 50 microns to 600 microns below the tip of the wedge produces suitable results. In particular, the best results were achieved with the tip of the wire engaging structure 50 positioned 1.2 mm to 1.5 mm behind the tip the wedge, and 100 microns to 300 microns below the tip of the wedge. This configuration gave wire bonds 16 less than 50 microns above the nozzle array 38, each with a bond strength between 3.5 g and 5 g.

The wire engaging structure 50 is formed from a material with the surface hardness less than that of the wire. This avoids surface indentations on the wire which may later become stress concentration sites.

Adhering the Wire Bond to Reduce Loop Heights

FIG. 10 is a schematic section view of another technique used to reduce the height of the wire bond loops. An adhesive surface 62 is positioned on the LCP molding 6, between the contact pads 10 of the print head IC 4 and the corresponding conductor 12 on the flex PCB 8. The Applicant has found that a wire bonder will usually allow the wire bond 16 to drape downwards and touch the surface between the die and PCB while the wire is bonded to the PCB conductor. Once the wire has been welded to the contact pad on the die, the bonding tool draws it towards the conductors on the printed circuit board. As it is drawn across the gap between the die and printed circuit board, the wire drapes downwardly and rests on the underlying surface. Once the bonding tool has welded the other end of the wire to the conductor, and the wire clamp immediately behind the bonding tool breaks off the feed wire by pulling until tensile failure, the residual tension in the loop cause it to bow upwards. By positioning adhesive 62 at the point of contact between the wire and the LCP 6, the wire bond 16 is unable to bow upwards to the same height.

The adhesive surface 62 may be double sided tape, an adhesive paste or resin jetted onto the LCP 6 when the die 4 and the flex 8 are fixed, or it could simply be an extension of the die attach film 58.

The invention has been described herein by way of example only. The ordinary will readily recognize many variations and modifications which do not depart from the spirit and scope of the broad inventive concept. 

1. A method of profiling a series of wire bonds between a line of contact pads on a die, and a corresponding set of conductors on a supporting structure, the method comprising the steps of: electrically connecting each of the contact pads on the die to a corresponding conductor on the supporting structure with a respective wire bond, each of the wire bonds extending in an arc from the contact pad to the conductor; and, pushing on each of the wire bonds individually to collapse the arc and plastically deform the wire bond such that the plastic deformation maintains the wire bond in a flatter profile shape; wherein, the step of forming the line of wire bonds uses a wirebonder that has a bonding tool for moving between the contact pads and their respective corresponding conductors, and the line of wire bonds are sequentially pushed by a wire engaging structure on the wirebonder, the wire engaging structure and the bonding tool being configured for synchronized movement such that the wire engaging structure pushes the wire bond immediately adjacent the wire bond currently being formed by the bonding tool.
 2. A method according to claim 1 wherein the wirebonder is a wedge type wirebonder and the bonding tool is a wedge such that during use, the wedge holds a piece of wire in contact with one of the contact pads on the die to form a weld connection before moving to the corresponding conductor on the PCB to weld the other end of the wire and formal wire bond, and the wire engaging structure has a wire pushing surface that contacts the wire bond, the wire pushing surface is adjacent to, and 1.0 mm to 1.6 mm behind the wedge with respect to the movement of the wedge towards the IC die.
 3. A method according to claim 2 wherein the wire pushing surface is between 50 microns to 400 microns closer to the PCB than the wedge.
 4. A method according to claim 1 wherein the line of wire bonds does not extend more than 150 microns above the contact pads of the IC die.
 5. A method according to claim 4 wherein the line of wire bonds does not extend more than 50 microns above the contact pads of the IC die.
 6. A method according to claim 1 wherein the wire bonds are attached to the contact pads with a bond strength greater than 3 g force.
 7. A method according to claim 1 wherein the contact pads are spaced from the corresponding conductors on the PCB by more than 1 mm.
 8. A method according to claim 7 wherein the contact pads are between 2 mm and 3 mm from the corresponding conductors on the PCB.
 9. A method according to claim 1 wherein the PCB is a flexible PCB mounted to a support structure together with the die such that the conductors are adjacent the contact pads on the die.
 10. A method according to claim 9 wherein the support structure has a chip mounting area for supporting the die, the die having a back surface in contact with the chip mounting area and an active surface opposing the back surface, the active surface having the contact pads, and the chip mounting area being raised relative to the remainder of the support structure such that the contact pads are raised relative to the conductors.
 11. A method according to claim 10 wherein the support structure is a liquid crystal polymer (LCP) molding.
 12. A method according to claim 10 wherein the active surface has functional elements spaced less than 260 microns from the contacts pads of the die.
 13. A method according to claim 12 wherein the die is an inkjet printhead IC and the functional elements are nozzles through which ink is ejected.
 14. A method according to claim 11 wherein the wire bonds are covered in a bead of encapsulant, the bead of encapsulant extending less than 200 microns above the active surface of the die.
 15. A method according to claim 14 wherein the wire bonds are covered in a bead of encapsulant, the bead of encapsulant having a profiled surface that is flat, parallel to and spaced less than 100 microns from the active surface.
 16. A method according to claim 13 wherein the printhead IC is mounted in a printer such that during use the nozzles are less than 100 microns from the paper path. 